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ZL014029 Metal Film Thickness Measurement (4PP)
  • ZL014029 Metal Film Thickness Measurement (4PP)

    ZL014029 Metal Film Thickness Measurement (4PP)

     

    Application

    • Capable for Ti , Cu , Ag, Au, Tiw, Ni, Al, ZrN, TaN, ITO …various metal film.

     

    Features

    • Wafer Size:150/200/300 mm
    • Fully automation / Manual load with auto measurement Pre-aligner for 150/200/300mm (option)
    • RFID reader (option)
    • Support OHT/AGV/SECS GEM200 or SECS GEM300
    • Resistance Measure by KEITHLEY/HIOKO Meter
    • Data display by 2D/3D Map in software and report upload
    • ESD protection
    • Capable for Ti , Cu , Ag, Au, Tiw, Ni, Al, ZrN, TaN, ITO …various metal film
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