ZLMSX100062 Lithography & Wet Process Tools

ZLMSX100062 Lithography & Wet Process Tools
 
Features
Automated system up to 200 mm
Spin Coating
Spin Developing
Baking
SECS / GEM
Dimensions (mm) :
1800(W) X 1600(0) X 1950(H)
Provide customized spec