ZLMSX 2000063 Lithography & Wet Process Tools

ZLMSX 2000063 Lithography & Wet Process Tools
 
Features
Automated system up to 200 mm 
Spin Coating 
Spin Developing
Baking 
SECS / GEM 
Interface System Dimensions (mm) : 
3580(W) X 1850(0) X 1950(H)
Provide customized spec