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ZL004005 Wafer Handler - 3D Microscope

ZL004005 Wafer Handler - 3D Microscope

Feature

-Desktop wafer transfer device.

-Can support 4"~8" wafer size.

-Support various Open Cassette materials: PP; PFA; Metal; PC…etc.

-Can support Slot 25; Slot 13; Slot 12 Cassetter type.

-Non-contact edge finding, which can correspond to transparent and non-transparent materials.

-It can be matched with automatic loading stage to achieve fully automatic production.

-It can be matched with macroscopic inspection mechanism to achieve macroscopic and microscopic one machine with multiple purposes.

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