ZLVAN300DIO058 Wet Bench
ZLVAN300DIO058 Wet Bench
Features
- SEMI-S2 Certified
- SECS/GEM Available
- Capable for 2” ~ 12 ” Wafer, Penal, Glass, Substrate
- Customized Design for Load/Unload, Robot, Tank, Cassette
Applications
- PR Strip
- Cu Plating
- RCA Clean
- Nitride, Silicon, Metal Etch
- Wafer Reclaim
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