ZLWSR300055 4L Wafer Sorter

ZLWSR300055 4L Wafer Sorter
 
Wafer Size：4”-6” /6”-8” /8”-12”
Up to 4 load portsupport PP/PFA/Metal open Cassette
High speed 5axis dual end-effecter robot
Auto Mapping function
Wafer Pre-aligner for notch & flat
Support SECS / GEM200 or GEM300
Sorter Function: dismantle、merge、random、rearrangement
Wafer ID reader Top/Bottom(option)
ESD protection
Support Ultra-Thin & high warpage wafer