ZL018034 Fully Auto Raman Analysis System
ZL018034 Fully Auto Raman Analysis System
Features
- 300/200/150mm wafer molecular analysis
- Customization
- With SECS/GEM200 or GEM300 .
- High Flexibility、High Cleanliness、High UPH EFEM.
- Support OHT/AGV system.
- ESD protection
- Raman analyzer inside, we could qualify the Semi. wafer (III-V, Si, Sic…)
- Chamber parts with the molecular analysis for avoiding poor yield and reducing the loss of main power, time and material.
Description
- Stress Characterization
- Material Purity
- Metal Doping
- Pollutant Identification
- Superlattice Structure
- Defect Analysis
- Heterostructure
- Doping Effect
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