SEMI-CON PROCESS | Ziliancorp

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SEMI-CON Process

01

Dry Etching Descum

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02

Wet Process - GPTC

Single Wafer Processor
UFO-A Series

03

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Combo System
UFO-C Series
Soaking + Spin

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Single Wafer Processor
UFO-A Series

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Wet Etching - CLC

04

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True P Technology

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Vacuum high-temperature oxygen-free oven/vacuum anti-oxidation curing furnace

05

Sorter / Loader - SYO

Kino Wafer Loader

8 inch Frame

Wafer Inspection

06

Photolithography - CFMEE

MLF Series Direct Write Lithography Tools

WLP Wafer-level
Advanced Packaging

12 inch Frame Wafer

Inspection (with Marco)

07

Facility - PASSAL

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Double Membrane Filter

Press

Slurry Washing System

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Purifying Filter System

Wafer IR Inspection

08

YAYA TECH

Reel IR Inspection

Strip IR Inspection

IR Inspection

IR OM

09

Wise Pioneer

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10

iWISEETEC

ABT-08

ADC-08

ABT-12

ALC-12

SPB-08

11

Photolithography - HYE Technology Co., Ltd.

12

FILM

13

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PIOTEC

14

Metrology - i-BOT Technology

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15

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Scrubber

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