Features:
300/200/150mm wafer molecular analysis
Customization
With SECS/GEM200 or GEM300 .
High Flexibility、High Cleanliness、High UPH EFEM.
Support OHT/AGV system.
ESD protection
Raman analyzer inside, we could qualify the Semi. wafer (III-V, Si, Sic…)
Chamber parts with the molecular analysis for avoiding poor yield and reducing the loss of main power, time and material.