pplication & Features:
For CVD and Etch applications
Suitable for small-flow, high-concentration gas treatment
Capacity: <100 slm
Size: 800 × 850 × 1800 mm
Power: Avg. 3 kW
Weight: 450 kg
Heating temperature: 300°C–600°C
Handles NF₃, SF₆, CF₄, and other PFC gases
Integrated catalytic absorption purifier
Processing efficiency up to 95%
Features low energy consumption and stable operation