ZL010025 Frame Sorter System
ZL010025 Frame Sorter System
Features
- Metal Frame Size: 8” / 12’
- Up to 4 load port
- Support Metal Cassette
- Customized Robot Type
- Auto Mapping function
- Support SECS / GEM200 or GEM300
- Sorter Function: dismantle、merge、random、rearrangement
- Wafer ID/Frame ID reader
- Support Frame ID barcode/QR Code read
- Metal cassette Stop lever detection with interlock
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