ZL017033 Automated Optical Inspection (AOI)
ZL017033 Automated Optical Inspection (AOI)
Features
- Wafer Size：8” -12”
- Automated Optical Inspection Function
- Auto defect/particle inspection
- 5 axis Robot
- Wafer Pre-aligner for 8”/12”
- Wafer ID reader (option)
- RFID reader (option)
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