Wafer spin dryers are mainly used for drying wafers, substrates, and glass after cleaning, and are a key and important piece of equipment in semiconductor manufacturing processes. The principle involves using high-speed rotation to quickly remove water droplets from the product surface, followed by blowing with drying gas (N₂) to achieve rapid and stable drying.
The SV Model is a vertical spin dryer, with SV-702, SV-805, SV-802 and SV-300 models available to suit different products. The SH Model is a horizontal spin dryer, supporting up to 6-inch 4-station products, and can spin up to 100 wafers (products) at a time, increasing production line efficiency.
 
Product Features:
The world's only motor is suitable for long-term continuous operation.
Purification, speed control, temperature control, electrostatic ion control
Custom rotor design features low vibration performance
The integrated TFT full-color touch interface provides various device information.
Supports GEM/SECSII communication protocols