Application
Areal 3D surface metrology for:
Quality Control (QC): automated procedures, 24/7 operation, pass/fail reporting
Research & Development (R&D): flexible lab measurements with minimal compromise across surface types
 
Features
High speed:
180 fps data acquisition; standard measurements ~5× faster than previous generation; “fastest areal measurement system”
Easy to use:
one-click operation; intuitive UI; configurable software modules
QC automation:
user access rights, recipes, barcode/QR compatibility, customized plugins, automatic pass/fail reports (SensoPRO)
3-in-1 measurement (single sensor head):
Confocal
Interferometry
AI Focus Variation
Thin film thickness:
transparent layers 50 nm to 1.5 μm measured in < 1 s; spot diameter depends on objective (~0.5–40 μm)
LED illumination:
fewer laser artifacts (interference/scatter), faster area illumination, ~50,000 h lifetime, multiple wavelengths
Validation & traceability:
calibrated with traceable standards per ISO 25178 (parts 600 & 700) for Z factor, XY scale, flatness, noise, parcentricity/parfocality; includes accuracy & repeatability verification
High resolution / low noise:
nanometer-level system noise; example cited 0.3 nm topography capability
DIC observation:
differential interference contrast (Nomarski prism) to enhance very small height features (sub-nanometer scale visibility)